| 摘要 |
In interferometry, such as that of an electromagnetic field exceeding the coherence length of an electron beam, since leakage of the electromagnetic field into a reference wave influences the observation results, a method for eliminating or attenuating this influence is sought for highly precise electromagnetic field measurements. Focusing on the axial symmetry of the electromagnetic field, the present invention records, as a hologram, each interference between an object wave region and each electron beam passing through each of reference wave regions, the object wave region being the axially symmetric electromagnetic field serving as a subject to be observed, and the reference wave regions being a plurality of regions opposing each other across the center of symmetry of the electromagnetic field. After each reconstructed phase distribution image has been determined and once each of the reconstructed phase distribution images has been aligned in such a manner that the orientation thereof matches the center of symmetry of the electromagnetic field, arithmetic processing such as arithmetic averaging is performed. In this manner, the influence of the electromagnetic field exerted on each of the reference wave regions is cancelled, allowing highly precise measurement results to be achieved, in which the influence of the electromagnetic field of the observed subject into the reference wave is attenuated. |
