| 摘要 |
To suppress performance deterioration of laser light. This laser chamber is provided with: a first discharge electrode; a second discharge electrode; a fan that makes a laser gas flow into a discharge space between the first discharge electrode and the second discharge electrode; first insulating members that are disposed in the laser gas flow upstream and downstream of the first discharge electrode; a first metal damper member that is disposed in the laser gas flow upstream of the second discharge electrode; a second insulating member that is disposed in the laser gas flow downstream of the second discharge electrode; and a second metal damper member that is disposed in the laser gas flow downstream of the second insulating member. At the boundary portion between the second metal damper member and the second insulating member, a first surface of the second metal damper member, said first surface being on the discharge space side, is positioned further toward the opposite side to the discharge space than a second surface of the second insulating member, said second surface being on the discharge space side, and a first corner portion formed by the first surface and a first side surface of the second metal damper member, said first side surface being on the second insulating member side, may be in contact with a second side surface of the second insulating member, said second side surface being on the second metal damper member side. |
