MULTI-LAYER CERAMIC/METAL GAS SENSOR AND MANUFACTURING METHOD THEREFOR

摘要

The present invention relates to a gas sensor and a manufacturing method therefor, wherein: a multi-layer ceramic/metal platform, having a plurality of sequential layers of ceramic dielectric and metal, is cut in the layer direction and serves as a sensor body of the gas sensor; the sensor body comprises at least one layered body having sequential layers of a ceramic dielectric, a first inner electrode, a ceramic dielectric and a second inner electrode; first and second inner electrodes are exposed on the cut surface formed by cutting; the first inner electrodes are electrically connected to a first electrode terminal provided on a first side surface of the sensor body; the second inner electrodes are electrically connected to a second electrode terminal provided on a second side surface of the sensor body facing the first side surface; at least one side surface having the first and second inner electrodes exposed thereon, except for the side surfaces of the sensor body having the first and second electrode terminals installed thereon, serves as a sensing surface; and a gas-sensitive material layer for detecting gas is formed on a part, or the whole, of the top of the sensing surface, or a gas-sensitive material layer for detecting gas is formed on a part, or the whole, of the top of the sensing surface having metal films on top of the exposed first and second inner electrodes, the metal films having a lower contact resistance with the gas-sensitive material layer than the first and second inner electrodes.