发明名称 PERMEABILITY EVALUATION METHOD
摘要 A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are separated by a specimen, applying a voltage between a positive electrode provided on the side of the first liquid and a negative electrode provided on the side of the second liquid and measuring the value of the current flowing between the positive electrode and the negative electrode, wherein the specimen contains an insulating material used in semiconductor production, and the heavy metal ion concentration of the first liquid is 0.5 mg/kg or more.
申请公布号 US2017038324(A1) 申请公布日期 2017.02.09
申请号 US201415304430 申请日期 2014.04.15
申请人 HITACHI CHEMICAL COMPANY, LTD. 发明人 SUZUMURA Koji;YAMAMOTO Kazuhiro;MURAHASHI Tomoko
分类号 G01N27/06;G01N15/08;C09J133/06 主分类号 G01N27/06
代理机构 代理人
主权项 1. A permeability evaluation method for evaluating permeability of heavy metal ions through a specimen, comprising: a step of, in a state in which a first liquid containing heavy metal ions and a second liquid containing water and an organic solvent are separated by a specimen, applying a voltage between a positive electrode provided on a side of the first liquid and a negative electrode provided on a side of the second liquid and measuring a value of a current flowing between the positive electrode and the negative electrode, wherein the specimen contains an insulating material used in semiconductor production, and a heavy metal ion concentration of the first liquid is 0.5 mg/kg or more.
地址 Tokyo JP