发明名称 ACTUATOR MODULE FOR ACTUATING A LOAD
摘要 The disclosure concerns an actuator module (10) for actuating a load (14). The actuator module (10) comprises a deformable frame (1) and an actuator (2) connected to the deformable frame (1). A time-varying force distribution (F) couples to an excited state (V0) of an eigenmode (V) of the deformable frame (1). The force distribution (F), as well as a stiffness distribution (K) and/or mass distribution (M) of the deformable frame 1 are adapted such that static nodal points (11s) of the deformable frame 1 are coincided with mode nodal points (11m). The locations where the nodal points coincide can be used to connect the actuator module (10) to a base frame to reduce transfer of vibrations to the base frame and back which may otherwise undesirably influence the transfer function from actuator to load. The disclosure further concerns a method for designing and/or manufacturing the actuator module.
申请公布号 EP3126849(A1) 申请公布日期 2017.02.08
申请号 EP20150719859 申请日期 2015.03.31
申请人 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO 发明人 WITVOET, Gerrit;VAN DEN DOOL, Teunis Cornelis;CROWCOMBE, William Edward;DE LANGE, Theodorus Jacobus;PEREBOOM, Hajo Pieter
分类号 G01Q10/04;G01Q30/04;H01L41/053;H02N2/02 主分类号 G01Q10/04
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