发明名称 半導体装置および半導体装置の製造方法
摘要 A semiconductor device has a resistor area and wiring area selectively disposed on a semiconductor substrate. In this semiconductor device, a second interlayer insulating film is formed above the semiconductor substrate, and a thin-film resistor is disposed on the second interlayer insulating film in the resistor area. Vias that contact the thin-film resistor from below are formed in the second interlayer insulating film. A wiring line is disposed on the second interlayer insulating film in the wiring area. A dummy wiring line that covers the thin-film resistor from above is disposed in a third wiring layer that is in the same layer as the wiring line, and an insulating film is interposed between the thin-film resistor and the dummy wiring line.
申请公布号 JP6075114(B2) 申请公布日期 2017.02.08
申请号 JP20130037578 申请日期 2013.02.27
申请人 ローム株式会社 发明人 西村 勇;三冨士 道彦;西尾 和真
分类号 H01L21/822;H01L27/04 主分类号 H01L21/822
代理机构 代理人
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