Stress-based sensor, method, and applications

摘要

A composite, analyte sensor includes a substrate; a micro- or nano-electro-mechanical (MEMS; NEMS) resonator that is coupled to the substrate at least two edge locations (i.e., it is at least doubly-clamped) of the resonator, wherein the resonator is in a statically-buckled state near a buckling transition point of the resonator; and a chemically-responsive substance covering at least a portion of the surface of the resonator that will undergo a conformational change upon exposure to a given analyte. The resonator may be a double-clamped, statically-buckled beam (or bridge), a multiply-clamped, statically-buckled dome (or crater), or other resonator geometry. The sensor may include two or more at least double-clamped, statically-buckled, composite MEMS or NEMS resonators each operating near a buckling transition point of the respective resonator, and each characterized by a different resonant frequency. A method for sensing an analyte in ambient air.

主权项

1. An analyte sensor, comprising:
a substrate; a composite micro- or nano-electro-mechanical (MEMS; NEMS) resonator comprising a structure configured to be driven into resonance and which is double-clamped such that it is coupled to the substrate at a plurality of edge locations of the structure, and a volume-sensitive reactive coating covering at least a portion of a surface of the structure, which is characterized by a volumetric change upon exposure to a given analyte, wherein the volumetric change comprises a change in a stress value of the resonator, further wherein the change in the stress value of the resonator comprises a measurable change in a resonance frequency of the resonator, further wherein the resonator is in a compressively-stressed, statically-buckled state that is not at a buckling transition point of the resonator when driven into resonance, wherein the resonator is in the form of a dome or drum.