Signal processing method of multiple mirco-electro-mechanical system (MEMS) devices and combo MEMS device applying the method

摘要

This invention provides a signal processing method of multiple micro-electro-mechanical system devices. The signal processing method includes: providing at least two MEMS devices; applying driving or modulating signals of different frequencies to the MEMS devices such that the MEMS devices generate respective MEMS signals with respective frequencies; and combining the MEMS signals with respective frequencies into one or more multi-frequency signals and outputting the multi-frequency signals, wherein a number of the multi-frequency signals is less than a number of the MEMS signals with respective frequencies. This invention also provides a combo MEMS device integrating two or more MEMS devices and two or more vibration sources.

主权项

1. A method for processing signals of multiple micro-electro-mechanical system (MEMS) devices, comprising:
providing at least two MEMS devices of different functions including at least two of the following functions: sensing gravity, sensing acceleration, sensing angular velocity, and sensing angular acceleration; applying a plurality of driving or modulating signals of different frequencies to the MEMS devices of different functions such that the MEMS devices of different functions respectively generate a plurality of MEMS signals of corresponding different functions with respective frequencies; and combining the MEMS signals of corresponding different functions with respective frequencies into one or more multi-frequency signals, and outputting the multi-frequency signals; wherein a number of the multi-frequency signals is less than a number of the MEMS signals of different functions with respective frequencies.