| 发明名称 |
APPARATUS FOR ATTACHING PELLICLE |
| 摘要 |
Apparatuses for attaching pellicle may be provided. For example, a pellicle attaching apparatus includes a lower supporter supporting a lower surface of a pellicle, an upper supporter supporting an upper surface of a reticle such that a lower surface of the reticle is in contact with a pellicle frame disposed on an upper surface of the pellicle, and a first sound wave generator disposed on the upper surface of the reticle to irradiate ultrasonic waves onto the upper surface of the reticle. |
| 申请公布号 |
US2017031240(A1) |
申请公布日期 |
2017.02.02 |
| 申请号 |
US201615088542 |
申请日期 |
2016.04.01 |
| 申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
JEONG HAE-YOUNG |
| 分类号 |
G03F1/64 |
主分类号 |
G03F1/64 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A pellicle attaching apparatus comprising:
a lower supporter supporting a lower surface of a pellicle; an upper supporter supporting an upper surface of a reticle such that a lower surface of the reticle is in contact with a pellicle frame, the pellicle frame on an upper surface of the pellicle; and a first sound wave generator configured to irradiate ultrasonic waves onto the upper surface of the reticle. |
| 地址 |
Suwon-si KR |
