EUV LIGHT MULTI-LAYER MIRROR

摘要

In order to make it possible to suppress breakage in a mirror that reflects EUV light having high light intensity, this EUV light multi-layer mirror has a Bragg diffraction effect and is formed by alternately stacking a plurality of heavy-element layers (102) and light-element layers (103) on a substrate (101). The heavy-element layers (102) have niobium as a main component, and the light-element layers (103) have silicon as a main component. For instance, heavy-element layers (102) composed of niobium and light-element layers (103) composed of silicon are alternately stacked on a substrate (101) composed of single-crystal silicon.