TABLE DEVICE, POSITIONING DEVICE, FLAT-PANEL DISPLAY MANUFACTURING DEVICE, AND PRECISION MACHINE

摘要

This table device is provided with a first drive device which applies a first axis direction force to a table, and a second drive device which applies a second axis direction force to the table. The first drive device includes a first actuator which produces motive power for moving the table in a first axis direction, and a first movable member which is moved along a first drive shaft parallel with the first axis, by means of the operation of the first actuator. The first movable member includes: a first linear bearing which moves along the first drive shaft; a first rotating bearing which is disposed around a first rod member fixed to the first linear bearing and which is rotatable relative to the first rod member; and a second linear bearing which is connected to the first rotating bearing and which is guided in a second axis direction by a second guide member fixed to an end, in the first axis direction, of the table.