| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of contributing to improvement in sensitivity and downsizing of a device.SOLUTION: In a first sensor 21, a capacitance part 27 including first and second fixed electrodes 28 and 29 and a movable electrode part 30B is collected in a row to the center portion of a weight part 24. In the capacitance part 27, the first and second fixed electrodes 28 and 29 and the movable electrode part 30B are disposed in parallel along an acceleration detection direction (a Y direction) at a position being the center portion of the weight part 24 in plane view of a substrate. Connection parts 28B and 29B connected with the substrate on an end (an end in a X direction) side in longitudinal directions of each of the fixed electrodes 28 and 29 are provided in the respective electrodes. |
