| 摘要 |
PROBLEM TO BE SOLVED: To provide a prober that can suppress an Abbe error when a maintenance target device is positioned.SOLUTION: A prober includes plural measuring units 14 each of which includes a maintenance target device 44 which is disposed between a feeding area A1 and a maintenance area A2 and used for inspecting a semiconductor element formed on a wafer W, and a drawing mechanism for drawing the maintenance target device 44 to the maintenance area A2 side, and a feeding unit 16 which has a housing for housing a feeding object, and moves to a position at which the measuring unit 14 at a feeding destination of the feeding object is accessible in the feeding area A1, thereby feeding the feeding object into the measuring unit 14 at the feeding destination. The drawing direction of the maintenance target device 44 and the feeding direction of the feeding object are on a straight line.SELECTED DRAWING: Figure 14 |
