发明名称 積層脆性材料基板のブレイク用のブレイクバー
摘要 PROBLEM TO BE SOLVED: To provide a break bar for breaking a laminated fragile material substrate which can surely break the laminated fragile material substrate together with layers composed of resin or metal.SOLUTION: In a break bar 14, an abutting part with a substrate 100 has a blade shape forming an angle &thetas; of 45 degrees or less. The angle &thetas; at a tip of the break bar 14 is preferably 35 degrees or less, and is further preferably 25 degrees or less. When breaking the substrate 100, the break bar 14 is pushed against along a scribe line 99 from a principal surface on a side provided with a layer 103 composed of resin or metal, and thereby, the layer 103 composed of the resin or the metal is cut, and the substrate 100 is broken.
申请公布号 JP6072184(B2) 申请公布日期 2017.02.01
申请号 JP20150191060 申请日期 2015.09.29
申请人 三星ダイヤモンド工業株式会社 发明人 武田 真和;村上 健二;田村 健太
分类号 B28D5/00;H01L21/301 主分类号 B28D5/00
代理机构 代理人
主权项
地址