发明名称 |
ウエハ状物品の液体処理のための方法及び装置 |
摘要 |
In an apparatus and method for treating a wafer-shaped article, a spin chuck is provided for holding a wafer-shaped article in a predetermined orientation wherein a lower surface of the wafer-shaped article is spaced a predetermined distance from an upper surface of the spin chuck. A heating assembly comprising at least one infrared heater is mounted above the upper surface of the spin chuck and below a wafer-shaped article when mounted on the spin chuck. The heating assembly is stationary in relation to rotation of the spin chuck. |
申请公布号 |
JP6073894(B2) |
申请公布日期 |
2017.02.01 |
申请号 |
JP20140529104 |
申请日期 |
2012.08.30 |
申请人 |
ラム・リサーチ・アーゲーLAM RESEARCH AG |
发明人 |
ホヘンヴァルター・カール−ハインツ;ラッハ・オット |
分类号 |
H01L21/304;H01L21/306;H01L21/683 |
主分类号 |
H01L21/304 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|