| 摘要 |
PROBLEM TO BE SOLVED: To provide an acid diffusion control agent excellent in LWR performance, resolution, rectangular shaped cross-section and focal depth of a radiation-sensitive acid diffusion controlling agent, and to provide the radiation-sensitive acid diffusion controlling agent using the acid diffusion control agent.SOLUTION: An acid diffusion control agent containing a compound represented by the formula (1), where R, R, Rand Reach independently represents a monovalent hydrocarbon group and the like, n represents 1 or 2, Rand Reach independently represents a hydrogen atom, a monovalent hydrocarbon group and the like, x represents a hydrogen atom or a hydrocarbon group, Y represents -CO- or -SO2-, and a radiation-sensitive acid diffusion controlling agent are provided. |
