发明名称 水蒸気透過率評価用構造体および水蒸気透過率評価方法
摘要 PROBLEM TO BE SOLVED: To provide a steam permeability evaluation structure body that can correctly measure steam permeability in a high barrier film having the steam permeability of 10g/m/day or less and is easily handled, and also to provide a steam permeability evaluation method.SOLUTION: In a steam permeability evaluation structure body 1, an aluminum thin film 3 patterned in a wiring shape is arranged on a substrate 2 and sealing is performed to cover the aluminum thin film 3 by a high barrier film 4 to be a measurement object. The steam permeability evaluation structure body is used to evaluate steam permeability by observing aluminum hydroxide to be generated by a reaction between the aluminum thin film 3 and steam permeating through the high barrier film 4.
申请公布号 JP6069906(B2) 申请公布日期 2017.02.01
申请号 JP20120144210 申请日期 2012.06.27
申请人 凸版印刷株式会社 发明人 黒木 恭子
分类号 G01N15/08;H01L51/50;H05B33/04;H05B33/10 主分类号 G01N15/08
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