テンプレート作製方法、パターン形成方法、半導体素子の製造方法、テンプレート製造装置、及びテンプレート材料

摘要

PROBLEM TO BE SOLVED: To manufacture a template with a fine pattern.SOLUTION: According to an embodiment, a method for manufacturing a template applies a first resin to a first template with an uneven pattern, cures the first resin, peels the cured first resin from the first template to manufacture a second template, and contracts the second template.