发明名称 ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, DISPLAY PANEL AND DISPLAY DEVICE
摘要 An array substrate and a manufacturing method thereof, a display panel and a display device are provided. The array substrate manufacturing method comprises: forming a source electrode and a drain electrode on a gate insulating layer; forming photoresist above the gate insulating layer and the source electrode and the drain electrode; etching the photoresist to form an opening region so as to expose the gate insulating layer between the source electrode and the drain electrode, and a part of the source electrode and a part of the drain electrode; and forming an active layer in the opening region, the active layer covering the exposed gate insulating layer, the part of the source electrode and the part of the drain electrode.
申请公布号 US2017025449(A1) 申请公布日期 2017.01.26
申请号 US201615175700 申请日期 2016.06.07
申请人 BOE TECHNOLOGY GROUP CO., LTD. ;SHANGHAI JIAO TONG UNIVERSITY 发明人 HUANG Wei;ZHAO Jiaqing;FENG Linrun;TANG Wei;GUO Xiaojun
分类号 H01L27/12 主分类号 H01L27/12
代理机构 代理人
主权项 1. An array substrate manufacturing method, comprising: forming a source electrode and a drain electrode on a gate insulating layer; forming photoresist above the gate insulating layer and the source electrode and the drain electrode; etching the photoresist to form an opening region so as to expose the gate insulating layer between the source electrode and the drain electrode, and a part of the source electrode and a part of the drain electrode; forming an active layer in the opening region, the active layer covering the exposed gate insulating layer, the part of the source electrode and the part of the drain electrode.
地址 Beijing CN