发明名称 Select Gates with Central Open Areas
摘要 A NAND flash memory array includes a select line having a first edge region containing a first portion of floating gate material and a second edge region containing a second portion of floating gate material, and having a central region between the first edge region and the second edge region where no floating gate material is present.
申请公布号 US2017025425(A1) 申请公布日期 2017.01.26
申请号 US201514808475 申请日期 2015.07.24
申请人 SanDisk Technologies, Inc. 发明人 Yaegashi Masahiro;Funayama Kota;Kawamura Takeshi;Iwata Dai
分类号 H01L27/115;H01L29/40;H01L21/265;H01L23/528;H01L29/788;H01L29/167;H01L21/768;H01L21/02;H01L29/49;H01L21/28 主分类号 H01L27/115
代理机构 代理人
主权项 1. A NAND flash memory array comprising: a plurality of word lines extending in a first direction over a substrate surface; a plurality of select lines extending in the first direction over the substrate surface; and an individual select line having a first edge region containing a first portion of floating gate material and a second edge region containing a second portion of floating gate material, and having a central region between the first edge region and the second edge region where no floating gate material is present.
地址 Plano TX US