METHOD FOR PREPARING SOLID STATE NANOPORES

摘要

The application relates to methods of forming arrays of solid state nanopores. A substrate is provided having an array of apertures extending through the substrate. The substrate is oxidized so that an oxide layer is formed on the substrate. The formation of the oxide layer reduces the cross-sectional dimensions of the apertures. This method is useful for producing arrays of nanopores having controlled dimensions.

主权项

1. A method for forming an array of nanopores comprising:
a) providing a substrate comprising an array of apertures extending therethrough, each of the apertures having one or more cross-sectional dimension; and b) oxidizing the substrate whereby an oxide layer is formed on the substrate and whereby the formed oxide lowers one or more cross sectional dimensions of the apertures to 20 nm or less.