MEMS COMPONENT INCLUDING A DIAPHRAGM ELEMENT WHICH IS ATTACHED VIA A SPRING STRUCTURE TO THE COMPONENT LAYER STRUCTURE

摘要

Measures are provided, by which mechanical stresses within the diaphragm structure of a MEMS component may be intentionally dissipated, and which additionally enable the implementation of diaphragm elements having a large diaphragm area in comparison to the chip area. The diaphragm element is formed in the layer structure of the MEMS component. It spans an opening in the layer structure and is attached via a spring structure to the layer structure. The spring structure includes at least one first spring component, which is oriented essentially in parallel to the diaphragm element and is formed in a layer plane below the diaphragm element. Furthermore, the spring structure includes at least one second spring component, which is oriented essentially perpendicularly to the diaphragm element. The spring structure is designed in such a way that the area of the diaphragm element is greater than the area of the opening which it spans.

主权项

1. A MEMS component, comprising:
a layer structure; at least one diaphragm element formed in the layer structure, the diaphragm element spans an opening in the layer structure and is attached via a spring structure to the layer structure; wherein the spring structure includes at least one first spring component which is oriented essentially in parallel to the diaphragm element and is formed in a layer plane below the diaphragm element, the spring structure includes at least one second spring component, which is oriented essentially perpendicularly to the diaphragm element, and the spring structure is designed in such a way that the area of the diaphragm element is greater than the area of the opening which the diaphragm element spans.