发明名称 薄膜トランジスタの製造方法
摘要 PROBLEM TO BE SOLVED: To provide a thin film transistor which allows a semiconductor layer to be formed with high alignment accuracy and enables device isolation of the transistor without increasing the number of processes, and to provide a manufacturing method of the thin film transistor and an image display device.SOLUTION: A thin film transistor 50 has: a substrate 1; a gate electrode 2 formed on the substrate 1; a gate insulator layer 4 formed over the substrate 1 and the gate electrode 2; a semiconductor layer 5 formed on the gate insulator layer 4; a protection layer 6 formed on the semiconductor layer 5; a source electrode 7 and a drain electrode 8 formed over the gate insulator layer 4, the semiconductor layer 5, and the protection layer 6. One end 5a at the semiconductor layer 5 in a direction of a current flowing through a channel part between the source electrode 7 and the drain electrode 8 matches with one end 7a of the source electrode 7, and the other end 5b at the semiconductor layer 5 matches with one end 8a of the drain electrode 8.
申请公布号 JP6064353(B2) 申请公布日期 2017.01.25
申请号 JP20120075187 申请日期 2012.03.28
申请人 凸版印刷株式会社 发明人 村田 広大
分类号 H01L29/786;G02F1/1368;H01L21/336;H01L51/05;H01L51/40 主分类号 H01L29/786
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