发明名称 |
RETRACTABLE AND EXPANDABLE WATER COOLED VALVE GATE USEFUL FOR SEALING A HOT PROCESSING CHAMBER |
摘要 |
A pendulum gate valve including an expandable gate which pivots when unexpanded to selectively block a vacuum or other pressure-differential passage. The valve includes a valve plate sealing one side of the passage and a ring or barrier plate abutting an opposed side of the passage when the gate member is expanded. A compression spring biases apart the valve plate and ring to close the valve by means of respective two-stage hangers attached thereto, extending along the spring, and having distal ends capturing the spring. Pneumatic pressure applied to a pneumatic cavity formed between the middles of the two-stage hangers and accommodating the spring forces apart the valve plate and ring to open the valve in the blocking position. Thereby if pressure fails, the valve fails to a sealed state. The axially movable valve or barrier plate is advantageously water cooled to allow use with a heated processing chamber. |
申请公布号 |
EP2577139(A4) |
申请公布日期 |
2017.01.25 |
申请号 |
EP20100852318 |
申请日期 |
2010.11.10 |
申请人 |
GTAT IP Holding LLC |
发明人 |
WILLIAMS, Dick, S.;LUTER, William, L. |
分类号 |
F16K51/02;F16K3/28;F16K3/30;F16K31/64 |
主分类号 |
F16K51/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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