发明名称 基板収納容器
摘要 A substrate storing container that stores substrates composed of semiconductor wafers includes: a locked portion that is arranged at a center portion of an upper wall and is locked by a lifting member that can lift a container main body; in which the locked portion includes a plate-like flange portion having a lower face that faces the upper wall and an elastically deformable elastic member provided at a lower face of the flange portion and/or at a rim portion of the flange portion; and in which the locked portion is locked by the lifting member in a state in which the elastic member is sandwiched between the flange portion and the lifting member.
申请公布号 JP6067129(B2) 申请公布日期 2017.01.25
申请号 JP20150536356 申请日期 2013.09.11
申请人 ミライアル株式会社 发明人 小山 貴立;永島 剛
分类号 H01L21/673;B65D25/22;B65D85/30 主分类号 H01L21/673
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