Semiconductor device carrying a micro electro mechanical system

摘要

An object of the present invention is to enhance the reliability of an MEMS sensor formed on a semiconductor integrated circuit device. To achieve this object, a semiconductor device of the present invention comprises: a semiconductor integrated circuit device; a lower passivation film (6) of silicon nitride, etc. formed on the semiconductor integrated circuit device and having high moisture resistance and high chemical resistance; an MEMS portion formed on the lower passivation film (6) and including a cavity (12); and an upper passivation film (11) formed on the top surface of the MEMS portion such that the MEMS portion is hermetically sealed by the upper and lower passivation films (6, 11).