| 发明名称 |
METHOD OF MANUFACTURING A THIN FILM |
| 摘要 |
This invention relates to a substrate (1) weakened by the presence of a micro-cavities zone, the micro-cavities zone (4') delimiting a thin layer (5) with one face (2) of the substrate (1), some or all of the gaseous species having been eliminated from the micro-cavities (4'). The invention also relates to a process for the production of such a substrate. |
| 申请公布号 |
EP1285461(B1) |
申请公布日期 |
2017.01.25 |
| 申请号 |
EP20010940623 |
申请日期 |
2001.05.29 |
| 申请人 |
Commissariat à l'Énergie Atomique et aux Énergies Alternatives |
发明人 |
ASPAR, Bernard;LAGAHE, Chrystelle;RAYSSAC, Olivier;GHYSELEN, Bruno |
| 分类号 |
H01L21/265;H01L21/762;H01L21/02;H01L21/20;H01L21/301;H01L21/34;H01L21/78;H01L27/12 |
主分类号 |
H01L21/265 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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