A MINIATURE HIGH SENSITIVITY PRESSURE SENSOR

摘要

There is described a miniature fiber optic pressure sensor design where sensitivity around specific biased pressure is optimized. In an embodiment, the pressure sensor is a Fabry-Perot (FP) sensor which comprises a substrate; and a diaphragm mounted on the substrate. The diaphragm has a center and comprises: a first layer comprising a first material; and a second layer comprising a second material. The second layer forms a dot or a ring. The dot or ring is mounted on the first layer and is centered about the center of the diaphragm. The second material comprises internal pre-stresses to cause the center of the diaphragm (in the case of a dot) or the peripheral area about the center of the diaphragm (in the case of a ring) to camber away from the substrate upon relaxing the internal pre-stresses.