OMM ROTATION RATE SENSOR INCLUDING A DRIVE, WITHOUT STATIONARY ELECTRODES

摘要

A rotation rate sensor which includes a substrate, a first structure which is movable relative to the substrate and a second structure which is movable relative to the substrate and relative to the first structure. The first structure includes at least one first drive device and the second structure includes at least one second drive device. The first and second drive devices are situated for the joint deflection of the first structure from a neutral position of the first structure in parallel to a drive direction and of the second structure from a neutral position of the second structure in parallel to the drive direction, due to an interaction between the first and second drive devices in such a way that the first and second structures are excitable into an oscillation in phase opposition, in each case with a motion component in parallel to the drive direction.

主权项

1. A rotation rate sensor, comprising:
a substrate having a main plane of extension; a first structure which is movable relative to the substrate, the first structure including at least one first drive device; and a second structure which is movable relative to the substrate and relative to the first structure, the second structure including at least one second drive device; wherein the first drive device and the second drive device are situated for joint deflection:
of the first structure from a neutral position of the first structure in parallel to a drive direction, andof the second structure from a neutral position of the second structure in parallel to the drive direction,due to an interaction between the first drive device and the second drive device in such a way that the first structure and the second structure are excitable into an oscillation in phase opposition, in each case with a motion component in parallel to the drive direction.