CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER, PROBE AND METHOD OF MANUFACTURING THE SAME

摘要

Disclosed is a Capacitive Micromachined Ultrasonic Transducer (cMUT) including: an anchor; and a membrane coupled with the anchor, wherein the anchor includes at least one anchor groove. According to the cMUT, a probe, and a method of manufacturing the probe, it is possible to widen a contact area between the cMUT and a lens. Accordingly, it is possible to increase the interfacial strength between the cMUT and the lens while protecting the membrane of the cMUT. Also, the peeling phenomenon of the lens can be prevented, and the durability of transducers can be improved.