发明名称 DEVICE FOR CORRECTING POSITION OF SEMICONDUCTOR PARTS
摘要 PURPOSE:To enable the title device to quickly and easily cope with various kinds of IC chips, namely, semiconductor parts. CONSTITUTION:A plurality of engaging members 133 which are engaged with semiconductor parts 19 and correct the position of the parts 19 are constituted in movable states and independently moved by means of moving means. In addition, the operation of the actuating means installed to each moving means can be controlled. Since such a constitution is used, the engaging members can be individually and freely moved to and stopped at arbitrary positions and, as a result, the members 133 can handle semiconductor parts having various kinds of shapes and dimensions and can quickly and easily cope with various kinds of semiconductor parts.
申请公布号 JPH0637134(A) 申请公布日期 1994.02.10
申请号 JP19920209419 申请日期 1992.07.15
申请人 KAIJO CORP 发明人 TORIGOE SOUZOU
分类号 H01L21/60;H01L21/52 主分类号 H01L21/60
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