Spatial light modulator based on metamaterial structure and preparation method thereof

摘要

A spatial light modulator based on a metamaterial structure and a preparation method thereof. The spatial light modulator includes an array of optical function elements and a control circuit. The optical function element includes a metamaterial structure formed by a metal nanostructure layer and a metal reflector layer, with a medium layer and nonmetal conducting material layer being provided between the metal nanostructure layer and the metal reflector layer. The spatial light modulator is simple in structure, high in integration, easy in manufacture and low in cost. Furthermore, the spatial light modulator is capable of high-speed modulation, the depth of modulation is controlled easily, and a low drive voltage may be obtained.

主权项

1. A spatial light modulator based on a metamaterial structure, comprising an array of optical function elements wherein each optical function element comprises a metamaterial structure comprising a metal nanostructure layer and a metal reflector layer, with a medium layer and a nonmetal conducting material layer being provided between the metal nanostructure layer and the metal reflector layer; and
an impedance of the metamaterial structure, at a set frequency and under a set bias voltage, is equal to or approximate to 376.7Ω, where “approximate to” means that the deviation amplitude is within ±5%.