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发明名称
MANUFACTURING METHOD OF LIGHT EMITTING DEVICE
摘要
실시 예는 기판을 질화 처리하여 표면층을 형성하는 단계; 상기 표면층상에 버퍼층을 형성하는 단계; 및 상기 버퍼층 상에 발광 구조물을 형성하는 단계를 포함하고, 상기 표면층을 형성하는 단계는, 질소 분위기에서 RF 전압을 30W이상 100W이하로 인가하는 발광소자 제조방법을 개시한다.
申请公布号
KR20170005680(A)
申请公布日期
2017.01.16
申请号
KR20150096071
申请日期
2015.07.06
申请人
엘지이노텍 주식회사
发明人
장정훈;남승근;임정순;최원희
分类号
H01L33/12
主分类号
H01L33/12
代理机构
代理人
主权项
地址
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