REDUCING HYSTERESIS EFFECTS IN AN ACCELEROMETER

摘要

In some examples, the disclosure describes an accelerometer having improved hysteresis effects, the accelerometer including a proof mass assembly including a proof mass, a support structure, and a flexure flexibly connecting the proof mass to the support structure to allow the proof mass to move about the plane defined by the support structure. Some examples may include at least one thin film lead including an electrically conductive material on the flexure, where the at least one thin film lead provides an electrical connection between an electrical component on the support structure and an electrical component on the proof mass, and where the at least one thin film lead comprises at least one of a yield strength greater than pure gold or a thermal expansion coefficient less than pure gold.

主权项

1. An accelerometer comprising a proof mass assembly comprising:
a proof mass; a support structure; a flexure flexibly connecting the proof mass to the support structure, wherein the flexure allows the proof mass to move about a plane defined by the support structure; and at least one thin film lead comprising an electrically conductive material on the flexure, wherein the at least one thin film lead provides an electrical connection between an electrical component on the support structure and an electrical component on the proof mass, and wherein the at least one thin film lead comprises at least one of a yield strength greater than pure gold or a thermal expansion coefficient less than pure gold.