发明名称 |
MOVABLE SUPPORT AND LITHOGRAPHIC APPARATUS |
摘要 |
The present invention relates to a movable support (1) configured to support an object, comprising: a support plane (2) to support the object, an actuator assembly to move the movable support in a first direction and in a second direction perpendicular to the first direction, wherein the first direction and the second direction extend in a plane parallel to the support plane, wherein the actuator assembly comprises: a first actuator (3) configured to exert a first actuation force (F1) in a first actuation direction (A1), said first actuation direction being parallel to the support plane, a second actuator (4) configured to exert a second actuation force (F2) in a second actuation direction (A2), said second actuation direction being parallel to the support plane, wherein the first actuation direction and the second actuation direction are arranged non-parallel and non-perpendicular with respect to each other. |
申请公布号 |
WO2017005387(A1) |
申请公布日期 |
2017.01.12 |
申请号 |
WO2016EP59508 |
申请日期 |
2016.04.28 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
DE GROOT, Antonius, Franciscus, Johannes;RUIJL, Theo, Anjes, Maria;VALENTIN, Christiaan, Louis |
分类号 |
G03F7/20;H01L21/68;H02P25/08 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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