发明名称 吸着ノズル、吸着装置及び機器製造方法
摘要 PROBLEM TO BE SOLVED: To provide a suction nozzle which opens and closes a passage and has a simple structure.SOLUTION: A suction nozzle 3 includes: a nozzle body 23; a valve body 25 provided in the nozzle body 23. An inner surface of the nozzle body 23 includes a taper surface 23bt where a diameter is reduced toward a tip side of the nozzle body 23. The valve body 25 includes a conical surface 25a where a diameter is reduced toward the tip side of the nozzle body 23. The conical surface 25a may move between an open position which faces the taper surface 23bt across a gap S1 and a closed position where the conical surface 25a contacts with the taper surface 23bt.
申请公布号 JP6058300(B2) 申请公布日期 2017.01.11
申请号 JP20120145893 申请日期 2012.06.28
申请人 京セラクリスタルデバイス株式会社 发明人 小関 友幸;橋本 明史
分类号 B25J15/06 主分类号 B25J15/06
代理机构 代理人
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