发明名称 |
SYMMETRIC DUAL PIEZOELECTRIC STACK MICROELECTROMECHANICAL PIEZOELECTRIC DEVICES |
摘要 |
The present invention relates to a device comprising an elongate resonator beam extending between first and second ends. A base is connected to the resonator beam at the first end with the second end extending from the base as a structural layer. The elongate resonator beam comprises either: (1) a first oxide layer on a first piezoelectric stack layer over a structural layer on a second oxide layer over a second piezoelectric stack layer on a third oxide layer or (2) a first oxide layer on a first piezoelectric stack layer over a second oxide layer on a structural layer over a third oxide layer on a second piezoelectric stack over a fourth oxide layer. Also disclosed is a system comprising an apparatus and the device, as well as methods of making and using the device. |
申请公布号 |
EP3114714(A1) |
申请公布日期 |
2017.01.11 |
申请号 |
EP20140884536 |
申请日期 |
2014.04.24 |
申请人 |
Microgen Systems Inc. |
发明人 |
ANDOSCA, Robert G.;VAETH, Kathleen M.;LACROIX, Didier |
分类号 |
H01L41/00 |
主分类号 |
H01L41/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|