发明名称 個体認証用構造体の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a method for producing a structure for individual authentication, which is a fine artificial product having cloning resistance.SOLUTION: A structure for individual authentication 1 is produced by applying a chemical ray-sensitive resist on a substrate 2 to form a resist layer 11, irradiating a desired portion of the resist layer 11 with chemical rays, and developing the resist layer 11 to form a resist structure 3 on the substrate 2. In the formation of the resist structure 3, external force is imparted to at least a part of a resist pattern 5 formed by developing the resist layer 11 so as to form one or more pattern aggregates 6.
申请公布号 JP6056305(B2) 申请公布日期 2017.01.11
申请号 JP20120203235 申请日期 2012.09.14
申请人 大日本印刷株式会社 发明人 法元 盛久;石川 幹雄;中田 尚子;福田 雅治;河野 佑介;千葉 豪;大八木 康之
分类号 G03F7/20;B29C33/38;B29C59/02;G03F7/40;G06K19/00;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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