发明名称 Variable resistance material layers and variable resistance memory devices including the same
摘要 A variable resistance material layer including germanium (Ge), antimony (Sb), tellurium (Te), and at least one type of impurities X. The variable resistance material layer having a composition represented by a chemical formula of Xp(GeaSb(1-a-b)Teb)(1-p), wherein an atomic concentration of the impurities X is in a range of 0<p≦0.2, an atomic concentration of Ge is in a range of 0.05≦a<0.19, and an atomic concentration of Te is in a range of 0.42≦b≦0.56.
申请公布号 US9543513(B2) 申请公布日期 2017.01.10
申请号 US201514965616 申请日期 2015.12.10
申请人 Samsung Electronics Co., Ltd. 发明人 Kim Do-Hyung;Kim Jong-Uk;Ahn Dong-Ho;Cho Sung-Lae
分类号 H01L45/00;H01L27/24 主分类号 H01L45/00
代理机构 Myers Bigel, P.A. 代理人 Myers Bigel, P.A.
主权项 1. A variable resistance material layer, comprising germanium (Ge), antimony (Sb), tellurium (Te), and at least one type of impurities (X), wherein the variable resistance material layer has a composition represented by a chemical formula of Xp(GeaSb(1-a-b)Teb)(1-p), and wherein an atomic concentration of X is in a range of 0<p≦0.2, an atomic concentration of Ge is in a range of 0.05≦a<0.19, and an atomic concentration of Te is in a range of 0.42≦b≦0.56, wherein the variable resistance material layer has a shape of a pillar, wherein a sum of top and bottom surface areas of the pillar is defined as M and an area of a sidewall of the pillar is defined as D, and wherein D is equal to or more than three times that of M.
地址 KR