发明名称 |
Variable resistance material layers and variable resistance memory devices including the same |
摘要 |
A variable resistance material layer including germanium (Ge), antimony (Sb), tellurium (Te), and at least one type of impurities X. The variable resistance material layer having a composition represented by a chemical formula of Xp(GeaSb(1-a-b)Teb)(1-p), wherein an atomic concentration of the impurities X is in a range of 0<p≦0.2, an atomic concentration of Ge is in a range of 0.05≦a<0.19, and an atomic concentration of Te is in a range of 0.42≦b≦0.56. |
申请公布号 |
US9543513(B2) |
申请公布日期 |
2017.01.10 |
申请号 |
US201514965616 |
申请日期 |
2015.12.10 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Kim Do-Hyung;Kim Jong-Uk;Ahn Dong-Ho;Cho Sung-Lae |
分类号 |
H01L45/00;H01L27/24 |
主分类号 |
H01L45/00 |
代理机构 |
Myers Bigel, P.A. |
代理人 |
Myers Bigel, P.A. |
主权项 |
1. A variable resistance material layer, comprising germanium (Ge), antimony (Sb), tellurium (Te), and at least one type of impurities (X),
wherein the variable resistance material layer has a composition represented by a chemical formula of Xp(GeaSb(1-a-b)Teb)(1-p), and wherein an atomic concentration of X is in a range of 0<p≦0.2, an atomic concentration of Ge is in a range of 0.05≦a<0.19, and an atomic concentration of Te is in a range of 0.42≦b≦0.56, wherein the variable resistance material layer has a shape of a pillar, wherein a sum of top and bottom surface areas of the pillar is defined as M and an area of a sidewall of the pillar is defined as D, and wherein D is equal to or more than three times that of M. |
地址 |
KR |