Method for positioning a transfer unit, method for calculating positional deviation amount of an object to be processed, and method for correcting teaching data of the transfer unit

摘要

In a method for positioning a transfer unit including, support pins for supporting object, and a pick having at a leading end thereof a detection unit for detecting presence or absence of the object, a height reference position of the pick is determined by detecting an upper edge of one of the support pins by the detection unit. A forward moving angle of the pick is corrected by obtaining a deviation angle between a radial direction of the mounting table passing through the corresponding support pin and a forward moving direction of the pick. A forward movement starting point of the pick is corrected by obtaining a horizontal deviation distance between the radial direction of the mounting table and the forward moving direction of the pick. A forward moving reference amount of the pick is obtained from coordinates of the corresponding support pin.

主权项

1. A method for positioning a transfer unit including a plurality of support pins for supporting a bottom surface of a peripheral portion of an object to be processed, a plurality of intermediate pins disposed at an inner peripheral side of the support pins, and a pick having at a leading end thereof a detection unit configured to detect presence or absence of the object, the pick being approachable and separable from a rotatable and vertically movable mounting table, the method comprising:
a height determining process of determining a height reference position of the pick by detecting an upper edge of one of the support pins by the detection unit; a first coordinate determining process of obtaining first coordinates which are coordinates of said one of the support pins having the rotation center of the pick as an origin; a second coordinate determining process of obtaining second coordinates which are coordinates of one of the intermediate pins having the rotation center of the pick as an origin; a third coordinate determining process of obtaining third coordinates which are coordinates of the rotation center of the mounting table based on the first and the second coordinates; and a final process of obtaining a forward moving angle, a forward movement starting point and a forward movement reference amount of the pick based on the first to the third coordinates, wherein the height determining process includes: making said one of the support pins directed toward a loading/unloading side of the object, positioning said one of the support pins and the pick such that said one of the support pins is detected by the detection unit; lowering said one of the support pins that has been detected and detecting the upper edge of said one of the support pins in response to non-detection of said one of the support pins; and determining the height reference position based on the height position where the upper edge is detected.