发明名称 |
Polishing pad |
摘要 |
A polishing pad has a polishing layer that is formed of a polyurethane foam having fine cells. The polyurethane foam is a reaction cured body of a chain extender and an isocyanate-terminated prepolymer which is obtained by reacting a prepolymer starting material composition that contains an isocyanate component, a high molecular weight polyol and an aliphatic diol. The high molecular weight polyol contains a polyalkylene glycol A that has a peak of the molecular weight distribution within the range of 200 to 300 and a polyalkylene glycol B that has a peak of the molecular weight distribution within the range of 800 to 1200. |
申请公布号 |
US9539693(B2) |
申请公布日期 |
2017.01.10 |
申请号 |
US201414761292 |
申请日期 |
2014.01.15 |
申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. |
发明人 |
Seyanagi Hiroshi |
分类号 |
B24B37/24;C08G18/48;B24D11/00;C08J9/12;H01L21/306;C08G18/00;C08G18/72;C08G18/12;C08G18/32;C08G101/00 |
主分类号 |
B24B37/24 |
代理机构 |
Law Office of Katsuhiro Arai |
代理人 |
Law Office of Katsuhiro Arai |
主权项 |
1. A method for producing a polishing pad, comprising the steps of:
(C) synthesizing an isocyanate-terminated prepolymer and (D) mixing a first component containing the isocyanate-terminated prepolymer with a second component containing a chain extender and curing the mixture to prepare a polyurethane foam, wherein: the step (C) comprises reacting an isocyanate component with an aliphatic diol and a polyalkylene glycol A that has number average molecular weight within the range of 200 to 300 to synthesize a prepolymer precursor and then reacting the prepolymer precursor with a polyalkylene glycol B that has a number average molecular weight within the range of 800 to 1200 to synthesize the isocyanate-terminated prepolymer, and the step (D) comprises adding 3 to 10 parts by weight of a silicone-based surfactant based on 100 parts by weight of the isocyanate-terminated prepolymer, to the first component containing the isocyanate-terminated prepolymer, further stirring the first component together with a non-reactive gas to form a cell dispersion liquid in which the non-reactive gas is dispersed in the form of fine cells, then mixing the second component containing the chain extender into the cell dispersion liquid, and curing the mixture to prepare a polyurethane foam. |
地址 |
Newark DE US |