JIG APPARATUS

摘要

A jig apparatus includes holding members on which an object to be processed is placed, which members are supported so that they are able to move in a vertical direction. The jig apparatus also includes control unit that controls positions in the vertical direction of the holding members. Control unit causes second holding members, which are selected from among holding members around first holding members on which the object is placed, to be moved to a place in the vertical direction, and to cause the first and second holding members to cooperate in holding the object.

主权项

1. A jig apparatus comprising:
one or more first holding members selected from among plural holding members supported so that the plural holding members are able to move in a vertical direction, an object to be processed being placed on the one or more first holding members; one or more second holding members selected from among the plural holding members, the one or more second holding members holding the object being processed, by receiving a force in a horizontal direction exerted by the object; and a control unit that moves the one or more second holding members in the vertical direction to a position where the one or more second holding members hold the object.