| 发明名称 |
BATCH PROCESSING APPARATUS |
| 摘要 |
Embodiments of batch processing apparatus and collapsible substrate support are provided herein. In some embodiments, a collapsible substrate support includes a base linearly moveable between a first position and a second position; and a first plurality of substrate support elements coupled to the base and including a lowermost substrate support element disposed in a fixed position with respect to the base and an uppermost substrate support element disposed above the lowermost substrate support element, wherein the uppermost substrate support element is linearly movable between a first position nearer to the lowermost substrate support element and a second position further from the lowermost substrate support element. |
| 申请公布号 |
US2017004982(A1) |
申请公布日期 |
2017.01.05 |
| 申请号 |
US201514788127 |
申请日期 |
2015.06.30 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SUNDARARAJAN Mukund;JUPUDI Ananthkrishna;KOPPA Manjunatha;RATHI Saket |
| 分类号 |
H01L21/67;H01L21/687 |
主分类号 |
H01L21/67 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A collapsible substrate support, comprising:
a base linearly moveable between a first position and a second position; and a first plurality of substrate support elements coupled to the base and including a lowermost substrate support element disposed in a fixed position with respect to the base and an uppermost substrate support element disposed above the lowermost substrate support element, wherein the uppermost substrate support element is linearly movable between a first position nearer to the lowermost substrate support element and a second position further from the lowermost substrate support element. |
| 地址 |
Santa Clara CA US |
