PROCESS KIT HAVING TALL DEPOSITION RING AND DEPOSITION RING CLAMP

摘要

Embodiments of process kits and process chambers incorporating same are provided herein. In some embodiments, a process kit includes a deposition ring configured to be disposed on a substrate support designed to support a substrate having a given width, including: an annular band configured to rest on a lower ledge of the substrate support; an inner lip extending upwardly from an inner edge of the annular band, wherein an inner surface of the inner lip and an inner surface of the annular band together form a central opening having a width that is less than the given width, and wherein a depth between an upper surface of the annular band and an upper surface of the inner lip is between about 24 mm and about 38 mm; a channel disposed radially outward of the annular band; and an outer lip extending upwardly and disposed radially outward of the channel.

主权项

1. A process kit, comprising:
a deposition ring configured to be disposed on a substrate support designed to support a substrate having a given width, the deposition ring comprising:
an annular band configured to rest on a lower ledge of the substrate support;an inner lip extending upwardly from an inner edge of the annular band, wherein an inner surface of the inner lip and an inner surface of the annular band together form a central opening having a width that is less than the given width, and wherein a depth between an upper surface of the annular band and an upper surface of the inner lip is between about 24 mm and about 38 mm;a channel disposed radially outward of the annular band; andan outer lip extending upwardly and disposed radially outward of the channel.