Piezoelectric material

摘要

The present invention provides a piezoelectric material which can be applied even to the MEMS technique, exhibits satisfactory piezoelectricity even at high ambient temperatures and is environmentally clean, namely, a piezoelectric material including an oxide obtained by forming a solid solution composed of two perovskite oxides A(1) B(1) O 3 and A(2)B(2)O 3 different from each other in crystalline phase, the oxide being represented by the following general formula (1):
€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ€ƒ X{A(1)B(1)O 3 }-(1-X) {A(2)B(2)O 3 }€ƒ€ƒ€ƒ€ƒ€ƒ(1)
wherein "A(1)" and "A(2)" are each an element including an alkali earth metal and may be the same or different from each other; "B(1)" and "B(2)" each include two or more metal elements, and either one of "B(1)" and "B(2)" contains Cu in a content of 3 atm% or more; and "X" satisfies the relation 0 < X < 1.