Electro-mechanical transducer element, liquid droplet ejecting head, image forming apparatus, and electro-mechanical transducer element manufacturing method

摘要

An electro-mechanical transducer element is disclosed. The electro-mechanical transducer element includes a first electrode formed on a substrate; an electro-mechanical transducer film formed on at least a part of the first electrode; and a second electrode formed on at least a part of the electro-mechanical transducer film. In at least one cross section of the electro-mechanical transducer film, a film thickness distribution shape is convex to the second electrode side.

主权项

1. An electro-mechanical transducer element, comprising:
a first electrode formed on a substrate; an electro-mechanical transducer film formed on at least a part of the first electrode; and a second electrode formed on at least a part of the electro-mechanical transducer film, wherein, in at least one cross section of the electro-mechanical transducer film, a film thickness distribution shape is convex to the second electrode side, and wherein the film thickness distribution shape is approximated by Equation 1: y=−ax2+b, wherein x denotes a coordinate position in a direction perpendicular to a film thickness direction with a cross section center of the electro-mechanical transducer film being set to 0 in the cross section, and y denotes a film thickness of the electro-mechanical transducer film at x.