Capacitive microelectromechanical switches with dynamic soft-landing

摘要

A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switched between the inactivated state and the activated state.

主权项

1. A microelectromechanical system (MEMS)-based electrical switch system, comprising:
at least one electrical switch, comprising:
a moveable electrode,a dielectric layer disposed adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the switch is in an inactivated position and in contact with the moveable electrode when the switch is in an activated position, anda substrate attached to the dielectric layer on a second side opposite to the first side; at least one voltage source coupled to the switch; and at least one resistive element positioned in series between the switch and the voltage source, the resistive element is configured to brake movement of the moveable electrode prior to coming in contact with the dielectric layer when the voltage source causes the switch to be switched between the inactivated state and the activated state; the substrate is formed from a plurality of electrically connected structures that are spaced from one another and held together by an insulator, the electrically connected structures forming a pattern of raised portions on the insulator.