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发明名称
PHOTO-MASKS FOR LITHOGRAPHY
摘要
극자외(EUV) 리소그래피에서 사용하는 포토마스크로서, 낮은 열팽창 계수와 높은 비강성(specific stiffness)을 가지는, 포토마스크.
申请公布号
KR20160140895(A)
申请公布日期
2016.12.07
申请号
KR20167030607
申请日期
2015.04.01
申请人
지고 코포레이션
发明人
트리카드 마크
分类号
G03F1/22;G03F1/46;G03F1/48;G03F1/76;G21K1/06;H05G2/00
主分类号
G03F1/22
代理机构
代理人
主权项
地址
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