| 摘要 |
The present invention evaluates the status of discharge or dielectric breakdown having occurred as a result of application of an impulse voltage or current to a test sample by an electrostatic discharge tester. An electromagnetic wave antenna measures a radiation electromagnetic wave signal generated from the electrostatic discharge tester when the electrostatic discharge tester is driven and a radiation electromagnetic wave signal generated from the test sample when discharge or dielectric breakdown occurs. An evaluation section main body obtains and displays a dielectric breakdown occurrence timing TFO after application of the voltage and a dielectric breakdown voltage VFO. The dielectric breakdown occurrence timing TFO is obtained from the time difference between an applied voltage generation time obtained from the radiation electromagnetic wave signal generated when the electrostatic discharge tester was driven and a discharge generation time obtained from the radiation electromagnetic wave signal generated when dielectric breakdown occurred. |
