发明名称 ELECTROSTRICTIVE ELEMENT MANUFACTURING METHOD
摘要 Provided is a method of manufacturing an electrostrictive element by which an electrostrictive element including an expandable and contradictable film electrode having a thin and uniform thickness can be easily formed. In a method of manufacturing an electrostrictive element 1, screen printing is performed while a first jig 12 contacts with a face of a dielectric film 2 opposite to a face where screen printing is performed such that the first jig 12 surrounds an area where the screen printing is performed. Thus, a film electrode 3 is formed.
申请公布号 US2016351790(A1) 申请公布日期 2016.12.01
申请号 US201514724171 申请日期 2015.05.28
申请人 The Board of Trustees of the Leland Stanford Junior University ;HONDA MOTOR CO., LTD. 发明人 Cutkosky Mark R.;Orita Atsuo
分类号 H01L41/33;B41F15/00 主分类号 H01L41/33
代理机构 代理人
主权项 1. A method of manufacturing an electrostrictive element that includes a dielectric film formed of elastomer, a film electrode formed on at least one face inside an outer peripheral edge of the dielectric film, the film electrode configured to be expandable and contractible following expansion and contraction of the dielectric film, and a frame arranged on the outer peripheral edge of at least the one face of the dielectric film, the frame configured to keep the dielectric film in a stretched state, the method comprising: a step of stretching the dielectric film formed of elastomer and keeping the dielectric film in the stretched state by arranging the frame on the outer peripheral edge of one face of the dielectric film; and a step of forming the film electrode by screen printing of a conductive paste including a conductive material on at least the one face of the dielectric film in the stretched state, wherein in the step of forming the film electrode, the screen printing is performed while a first jig contacts with a face of the dielectric film opposite to the face where the screen printing is performed such that the first jig surrounds an area where the screen printing is performed.
地址 Palo Alto CA US